REPUBLIC OF SERBIA

MINISTRY OF DEFENCE

www.mod.gov.rs

MINISTRY OF DEFENCE

Material Resources Sector

Defensive Technologies Department

Military Technical Institute

www.vti.mod.gov.rs

Characterization of PDMS membranes fabricated by bulk-micromachining on silicon wafers

Vesna Jović

Institute of Chemistry, Technology and Metallurgy, University of Belgrade, vjovic@nanosys.ihtm.bg.ac.rs

Zoran Đinović

Austrian Center for Medical Innovation and Technology, Wiener Neustadt, Austria, zoran.djinovic@acmit.at

filip Radovanović

Institute of Chemistry, Technology and Metallurgy, University of Belgrade, filip@nanosys.ihtm.bg.ac.rs

Marko STarčević

Institute of Chemistry, Technology and Metallurgy, University of Belgrade, mstarcevic@nanosys.ihtm.bg.ac.rs

Jelena Lamovec

Institute of Chemistry, Technology and Metallurgy, University of Belgrade, jejal@nanosys.ihtm.bg.ac.rs

Milče Smiljanić

Institute of Chemistry, Technology and Metallurgy, University of Belgrade, smilce@nanosys.ihtm.bg.ac.rs

Žarko Lazić

Institute of Chemistry, Technology and Metallurgy, University of Belgrade, zlazic@nanosys.ihtm.bg.ac.rs

Abstract: In this paper we proposed microfabrication scheme for PDMS (Polydimethylsiloxane) thin membrane fabrication on Si micromachined cavities with square cross section. PDMS network samples for this research were synthesized with the same composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, volume ratio 10:1. Mechanical testing of PDMS elastic properties and bond strength between membranes and oxidized Si wafers, were investigated applying pressurized bulge testing In this paper experimentally determined dependence of the PDMS membrane deflection on pressure load for different membrane thicknesses and sizes of square cavities in Si wafers are given. Also, the influence of different types of Si wafer structuring by anisotropic wet chemical etching on membrane bonding strength were considered.

Keywords: Polydimethylsiloxane (PDMS), bulk silicon micromachining, silicone elastomer membrane, bulging test, bonding strength