REPUBLIC OF SERBIA

MINISTRY OF DEFENCE

www.mod.gov.rs

MINISTRY OF DEFENCE

Material Resources Sector

Defensive Technologies Department

Military Technical Institute

www.vti.mod.gov.rs

analytical modelling of hydrogen sensing using ihtm thermopile based mems multipurpose sensors

DANIJELA RANDJELOVIĆ,

ŽARKO LAZIĆ,

OLGA JAKŠIĆ,

DANA VASILJEVIĆ RADOVIć

Centre of Microelectronic Technologies and Single Crystals, Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Belgrade, Serbia, danijela@nanosys.ihtm.bg.ac.rs

Abstract: Gas sensors have important applications in various areas such as industrial safety (process monitoring and control, emission monitoring), healthcare (medical diagnostics, environmental protection, homeland security and military (explosives, drugs, toxic gases, hazardous chemicals, biohazards), food processing industry (quality, production, transportation, storage), automotive (exhaust gas emissions monitoring, cabin air quality, engine management), domestic safety (indoor air quality, detection of early stage fires, false alarm prevention, natural gas leak detection ) etc. Among gas sensors there is a growing demand for inexpensive and compact hydrogen sensors since considerable efforts are put in development of hydrogen fuel cells for energy storage. Leakage hydrogen sensors will be needed in future hydrogen vehicles. They are also needed for safety control during production of hydrogen from natural gas. Widening of the application area of IHTM multipurpose thermopile based MEMS sensor towards hydrogen concentration sensing is presented in this work. Using existing 1D analytical model, thermal hydrogen sensor performance is studied for broad range of gas concentrations and at different temperatures. These multipurpose sensors have already been experimentally demonstrated for use as vacuum sensors, gas flow sensors, thermal converters, helium sensors.

Key words: hydrogen sensors, thermopile, MEMS sensor, analytical modelling.